Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C

by Milče M. Smiljanić, Žarko Lazić, Vesna Jović, Branislav Radjenović, Marija Radmilović-Radjenović
Published 2020-02-01

Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH

by Milče M. Smiljanić, Žarko Lazić, Branislav Radjenović, Marija Radmilović-Radjenović, Vesna Jović
Published 2019-01-01

Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects

by Milena Rašljić Rafajilović, Katarina Radulović, Milče M. Smiljanić, Žarko Lazić, Zoran Jakšić, Dragomir Stanisavljev, Dana Vasiljević Radović
Published 2020-08-01