Modification of spin-on-glass films properties during the thermal and plasma treatments

by Ivanchykau A. E., Kisel A. M., Medvedeva A. B., Plebanovich V. I.
Published 2009-04-01

Methods of removal of defects arising at liquid etching of polycrystalline silicon

by Ivanchykou A. E., Kisel A. M., Medvedeva A. B., Plebanovich B. I.
Published 2008-02-01