One-Dimensional Control System for a Linear Motor of a Two-Dimensional Nanopositioning Stage Using Commercial Control Hardware

by Lucía Candela Díaz Pérez, Marta Torralba Gracia, José Antonio Albajez García, José Antonio Yagüe Fabra
Published 2018-08-01

Trajectory Definition with High Relative Accuracy (HRA) by Parametric Representation of Curves in Nano-Positioning Systems

by Lucía Díaz Pérez, Beatriz Rubio Serrano, José A. Albajez García, José A. Yagüe Fabra, Esmeralda Mainar Maza, Marta Torralba Gracia
Published 2019-09-01