Atmospheric He/O2 plasma jet fine etching with a scanning probe microscope

by Kenta Nakazawa, Sho Yamamoto, Ei Nakagawa, Akihisa Ogino, Masaru Shimomura, Futoshi Iwata
Published 2020-09-01

Development of atomic force microscopy combined with scanning electron microscopy for investigating electronic devices

by Takeshi Uruma, Chiaki Tsunemitsu, Katsuki Terao, Kenta Nakazawa, Nobuo Satoh, Hidekazu Yamamoto, Futoshi Iwata
Published 2019-11-01

Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

by Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane
Published 2016-03-01