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Huamao Lin
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A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing
by
Tao Wang
,
Zhengjie Tang
,
Huamao
Lin
,
Kun Zhan
,
Jiang Wan
,
Shihao Wu
,
Yuandong Gu
,
Wenbo Luo
,
Wanli Zhang
Published 2020-03-01
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