Ferroelectricity, Piezoelectricity, and Dielectricity of 0.06PMnN-0.94PZT(45/55) Thin Film on Silicon Substrate

by Tao Zhang, Hailong Li, Chenlei Zhou, Huaze Zhu, Yahong Zhou, Fujun Liang, Huafeng Pang, Limei Hao, Shaorong Li
Published 2015-01-01

Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

by Tao Zhang, Fujun Liang, Min Li, Shaorong Li, Huafeng Pang, Sufang Wang, Huaze Zhu, Zhengxin Yan, Shenggui Zhao
Published 2015-01-01