Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications

by El-Mostafa Bourim, Hee Yeoun Kim, Nak-Kwan Chung
Published 2018-09-01

Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch

by Hee Yeoun Kim, Kyoung Min Kim, Byeong Il Kim, Won Soo Jang, Tae Hyun Kim, Tai Young Kang
Published 2011-04-01