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Haničinec Martin
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Haničinec Martin
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Properties of atmospheric pressure plasma oxidized layers on silicon wafers
by
Skácelová Dana
,
Sládek Petr
,
Sťahel Pavel
,
Pawera Lukáš
,
Haničinec
Martin
,
Meichsner Jürgen
,
Černák Mirko
Published 2014-11-01
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