Reactive ion etching: Optimized diamond membrane fabrication for transmission electron microscopy

by Li, Luozhou, Trusheim, Matthew, Gaathon, Ophir, Kisslinger, Kim, Cheng, Ching-Jung, Lu, Ming, Su, Dong, Yao, Xinwen, Huang, Hsu-Cheng, Bayn, Igal, Wolcott, Abraham, Osgood, Richard M., Englund, Dirk Robert
Published 2014