Rapid photolithographic fabrication of high density optical interconnects using refractive index contrast polymers

by Brusberg, L., FRISH, J.I, Himmelhuber, R., Jiang, L., Kim, K.-J, KLEINE, T.S, KOCH, T.L, MARTIN, K.P, Nishant, A., NORWOOD, R.A, Pau, S., Pyun, J., Showghi, S.
Published 2022