Electrowetting-on-Dielectric Actuation of a Vertical Translation and Angular Manipulation Stage

by Wang, Evelyn, Preston, Daniel John, Anders, Ariel S, Barabadi, Banafsheh, Tio, Evelyn, Zhu, Yangying, Dai, DingRan
Published 2017

Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage

by Preston, Daniel John, Anders, Ariel S, Barabadi, Banafsheh, Tio, Evelyn, Zhu, Yangying, Dai, DingRan, Wang, Evelyn
Published 2019