A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective

by Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang
Published 2021-01-01

The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing

by Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Joanne Ching Yee Wong, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang
Published 2021-01-01