Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma - A Brief Introduction

by IOP, Ahmad, MK, Aldalbahi, A, How, SR, Lias, J, Mahmood, MR, Mamat, MH, Nayan, N, Sahdan, MZ
Published 2018

Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction

by Aldalbahi, A., Hafiz Mamat, M., Khairul Ahmad, M., Lias, J., Nayan, N., Ren How, S., Rusop Mahmood, M., Zainizan Sahdan, M.
Published 2018