Experiments and simulation of the secondary effect during focused Ga ion beam induced deposition of adjacent nanostructures

by Chen Fang, Qing Chai, Xi Lin, Yan Xing, Zaifa Zhou
Published 2021-11-01

Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films

by Mengjie Li, Zaifa Zhou, Liyan Yi, Xijie Wang, Saeed Adnan
Published 2019-12-01