Impurity diffusion in ion implanted AlN layers on sapphire substrates by thermal annealing

by Okumura, Hironori, Watanabe, Yasuhiro, Shibata, Tomohiko, Yoshizawa, Kohei, Uedono, Akira, Tokunaga, Hiroki, Koseki, Shuuichi, Arimura, Tadanobu, Suihkonen, Sami, Palacios, Tomás
Published 2022