Classifiers Doppler effect Encapsulated MEMS Encapsulated micro-electro-mechanical system Heterodyne laser Doppler vibrometer Heterodyning IR laser Doppler vibrometry IR laser dopple vibrometry IR lasers Interferometry Laser Doppler Vibrometry Laser Doppler velocimeters Laser Doppler vibrometers Laser vibrometers Low-coherence Low-coherent light Low-coherent lights MEMS MEMS (microelectromechanical system) Refractive index Silicon Vibration analysis Vibration measurement