Competing growth of titanium nitrides and silicides in Ti thin films processed in expanding microwave plasma: Morphology and microstructural properties

by Isabelle Jauberteau, Pierre Carles, Richard Mayet, Julie Cornette, Annie Bessaudou, Jean Louis Jauberteau
Published 2018-09-01

Molybdenum Nitride Films: Crystal Structures, Synthesis, Mechanical, Electrical and Some Other Properties

by Isabelle Jauberteau, Annie Bessaudou, Richard Mayet, Julie Cornette, Jean Louis Jauberteau, Pierre Carles, Thérèse Merle-Méjean
Published 2015-10-01

Silicides and Nitrides Formation in Ti Films Coated on Si and Exposed to (Ar-N2-H2) Expanding Plasma

by Isabelle Jauberteau, Richard Mayet, Julie Cornette, Denis Mangin, Annie Bessaudou, Pierre Carles, Jean Louis Jauberteau, Armand Passelergue
Published 2017-02-01

Expanding Plasma Process for Nitriding Mo–Ti Bilayer Thin Films

by Isabelle Jauberteau, Richard Mayet, Julie Cornette, Pierre Carles, Denis Mangin, Annie Bessaudou, Jean Louis Jauberteau, Armand Passelergue
Published 2019-02-01