Novel method of alignment to buried cavities in cavity-SOI wafers for advanced MEMS devices

by Christopher Mountain, Marta Kluba, Lambert Bergers, Jaap Snijder, Ronald Dekker
Published 2019-12-01

Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

by Marta Maria Kluba, Jian Li, Katja Parkkinen, Marcus Louwerse, Jaap Snijder, Ronald Dekker
Published 2021-04-01